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1997鈦或氮化鈦底層與氧成分對金屬化製程之氮化鈦結構與性質的影響黃麒銓; Huang, Chyi-Chyuan; 林健正; 吳文發; Ling, Chien-Cheng; Wu, Wen-Fa; 材料科學與工程學系
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