標題: A Novel Si-based X'tal Oscillator Device Using 3D Integration Technologies
作者: Shih, Jian-Yu
Chen, Yen-Chi
Chiu, Chih-Hung
Lo, Chung-Lun
Chen, Kuan-Neng
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
公開日期: 1-一月-2014
摘要: A novel Si-based X\'tal oscillator device (1.2 mm x 1.0 mm) is demonstrated by using 3D integration technologies. It is distinct from conventional X\'tal oscillator device with ceramics and metal lid. The novel Si-based X\'tal oscillator device shows no leakage path, and passes the hermetic encapsulation test and reliability investigation. In addition, the novel device shows the excellent electrical characteristics and provides the possibility to replace the conventional fabrication approach for the next generation products.
URI: http://hdl.handle.net/11536/128531
ISBN: 978-1-4799-2217-8
ISSN: 
期刊: PROCEEDINGS OF TECHNICAL PROGRAM - 2014 INTERNATIONAL SYMPOSIUM ON VLSI TECHNOLOGY, SYSTEMS AND APPLICATION (VLSI-TSA)
顯示於類別:會議論文