Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 陳澤龍 | en_US |
| dc.contributor.author | 裘性天 | en_US |
| dc.contributor.author | 李紫原 | en_US |
| dc.date.accessioned | 2015-12-04T07:03:24Z | - |
| dc.date.available | 2015-12-04T07:03:24Z | - |
| dc.date.issued | 2015-08-11 | en_US |
| dc.identifier.govdoc | B82B001/00 | zh_TW |
| dc.identifier.govdoc | B82B003/00 | zh_TW |
| dc.identifier.uri | http://hdl.handle.net/11536/128750 | - |
| dc.description.abstract | 一種一維鈦金屬奈米結構之製造方法，其步驟包含：將一耐溫基材與一鈦金屬(Ti)置入一化學氣相沉積反應爐中；及利用一載流氣體將一四氯化鈦(TiCl4 )帶入該化學氣相沉積反應爐和該鈦金屬進行反應，且反應溫度為300~900℃，沉積溫度為200~850℃，該載流氣體之流量為0.1~50sccm，反應時間為5~60小時，使該四氯化鈦與該鈦金屬反應為一亞氯化鈦，再經由熱裂解而生成一一維鈦金屬奈米結構於該耐溫基材上。 | zh_TW |
| dc.language.iso | zh_TW | en_US |
| dc.title | 一維鈦金屬奈米結構及其製造方法 | zh_TW |
| dc.type | Patents | en_US |
| dc.citation.patentcountry | TWN | zh_TW |
| dc.citation.patentnumber | I495612 | zh_TW |
| Appears in Collections: | Patents | |
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