標題: Oxide Heteroepitaxy-Based Flexible Ferroelectric Transistor
作者: Tsai, Meng-Fu
Jiang, Jie
Shao, Pao-Wen
Lai, Yu-Hong
Chen, Jhih-Wei
Ho, Sheng-Zhu
Chen, Yi-Chun
Tsai, Din-Ping
Chu, Ying-Hao
交大名義發表
材料科學與工程學系
National Chiao Tung University
Department of Materials Science and Engineering
關鍵字: heteroepitaxy;flexible;ferroelectric transistor;muscovite;PZT
公開日期: 24-Jul-2019
摘要: With the rise of Internet of Things, the presence of flexible devices has attracted significant attention owing to design flexibility. A ferroelectric field-effect transistor (FeFET), showing the advantages of high speed, nondestructive readout, and low-power consumption, plays a key role in next-generation technology. However, the performance of these devices is restricted since conventional flexible substrates show poor thermal stability to integrate traditional ferroelectric materials, limiting the compatibility of wearable devices. In this study, we adopt flexible muscovite mica as a substrate due to its good thermal properties and epitaxial integration ability. A flexible FeFET composed of oxide heteroepitaxy on muscovite is realized by combining an aluminum-doped zinc oxide film as the semiconductor channel layer and a Pb(Zro7Ti0.3)03 film as the ferroelectric gate dielectric. The excellent characteristics of the transistor together with superior thermal stability and mechanical flexibility are demonstrated through various mechanical bending and temperature measurements. The on/off current ratio of the FeFET is higher than 103, which based on the field effect in the transfer curve. The smallest bending radius that can be achieved is 5 mm with a cyclability of 300 times and a retention of 100 h. This study opens an avenue to use oxide heteroepitaxy to construct a FeFET for next-generation flexible electronic systems.
URI: http://dx.doi.org/10.1021/acsami.9b06332
http://hdl.handle.net/11536/152686
ISSN: 1944-8244
DOI: 10.1021/acsami.9b06332
期刊: ACS APPLIED MATERIALS & INTERFACES
Volume: 11
Issue: 29
起始頁: 25882
結束頁: 25890
Appears in Collections:Articles