標題: MESOPOROUS CARBON POWDER GAS SENSORS FOR DETECTION OF CARBON MONOXIDE
作者: Lu, Chih-Cheng
Liao, Kuan-Hsun
Tsai, Jeff Tsung-Hui
Liu, Chueh-Yang
Leu, Jih-Perng
材料科學與工程學系
Department of Materials Science and Engineering
關鍵字: Mesoporous carbon powder;Dielectrophoresis;Microhotplate;MEMS;Gas sensor
公開日期: 1-十二月-2009
摘要: This article reports a new class of silicon-based microgas sensors utilizing hexagonally-ordered mesoporous carbon powders (MCPs) as the sensitive film. The mesoporous carbon powders featuring high-specific surface area are replicated by the SBA-15 silica template and immobilized between Cr electrodes on a 9 x 9 cm silicon chip by using a. c. dielectrophoresis (DEP) process at room temperature. The silicon sensor platform comprises Cr microheaters embedded in a dielectric thin membrane manufactured by microelectromechanical systems back-etching techniques. It is shown that MCPs can be satisfactorily aligned along electric fields and accumulated to the electrode area. Investigations into CO detection are carried out to verify gas-sensitive characteristics of the MCP nanofilm. Our experimental results disclose the mesoporous carbon powders are successfully chemoresistive to CO, and demonstrate distinct resistance change with respect to ppm-level variation. In addition, response time, recovery time, and reproducible sensing behavior are experimentally obtained.
URI: http://dx.doi.org/10.4015/S1016237209001684
http://hdl.handle.net/11536/6361
ISSN: 1016-2372
DOI: 10.4015/S1016237209001684
期刊: BIOMEDICAL ENGINEERING-APPLICATIONS BASIS COMMUNICATIONS
Volume: 21
Issue: 6
起始頁: 399
結束頁: 404
顯示於類別:期刊論文