電子束石版術中蒙地卡羅模擬程式之發展

Full metadata record

DC Field	Value	Language
dc.contributor.author	郭雙發	en_US
dc.date.accessioned	2014-12-13T10:36:20Z	-
dc.date.available	2014-12-13T10:36:20Z	-
dc.date.issued	2000	en_US
dc.identifier.govdoc	NSC89-2215-E009-096	zh_TW
dc.identifier.uri	http://hdl.handle.net/11536/93870	-
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=583860&docId=109699	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.language.iso	zh_TW	en_US
dc.title	電子束石版術中蒙地卡羅模擬程式之發展	zh_TW
dc.title	Development of Monte Carlo Simulation Program in Electron Beam Lithography	en_US
dc.type	Plan	en_US
dc.contributor.department	國立交通大學電子工程學系	zh_TW
Appears in Collections:	Research Plans

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