Characterization of the signature of subwavelength variation from far-field irradiance

Abstract

The dynamic signature of the subwavelength variation of a slit is shown to be determinable from far-field irradiance with a precision of better than 1 nm. One can increase the efficiency of measurement of the subwavelength's signature by adjusting the detection width over which the subwavelength variation is detected. The subwavelength variation of a rectangular aperture was also examined to show the general feasibility. (C) 2004 Optical Society of America