An endurance evaluation method for flash EEPROM

Abstract

Trap generation is hard to estimate in a Flash cell due to a dynamic stress field during program and erase. In this paper, a linear correlation is found between the erase state V-T rollup, and cycling V-T window. With the knowledge of the time dependence of erase stress field based on Fowler-Nordheim (FN) tunneling, the V-T rollup during cycling is evaluated by incorporating field dependent oxide trap generation. The extracted Delta V-T degradation slope during constant FN stress can be applied quantitatively to predict the V-T window closure during Flash cell cycling.

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