Design and Test of a MEMS-Based High G Smart Sensor

Abstract

Most conventional G sensors use cantilever beams or axial springs as triggering devices. The reaction time of these conventional G sensors are often far too long. In many high G (> 300 G) applications, they completely fail to function. This study proposed a microelectromechanical systems-based high G smart sensor, which not only functions at a very high G impact but also identifies the material when a projectile makes an impact on a hard object. This high G smart sensor is intended for use at 3000-21 000 G. The sensor was made of silicon and the triggering mechanism involves a cantilever and a spring structure. The mechanical sensitivity of the sensors can be adjusted to preset the triggering G value. Four sensors, each designated to trigger its own G value were integrated in a unit. Experiments demonstrated that this unit can identify the characteristics of an object.