Browsing by Author "Chen, Juhn-Horng"

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A modified transfer matrix method for the coupled lateral and torsional vibrations of asymmetric rotor-bearing systems
(2008-05-20)
Hsieh, Sheng-Chung
;
Chen, Juhn-Horng
;
Lee, An-Chen
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機械工程學系
;
Department of Mechanical Engineering
For analyzing the coupled lateral and torsional vibrations of asymmetric rotor-bearing system, an extended transfer matrix extended from one of the symmetric system is developed. Rather than the conventional "lumped system", the asymmetric rotating shaft is modeled by the Timoshenko beam in a continuous-system concept. According to our analysis, for the asymmetric isotropic rotor-bearing system, the synchronous lateral mode will split; moreover, there is a 2 x lateral mode that does not appear on symmetric isotropic rotor-bearing systems. (c) 2008 Elsevier Ltd. All rights reserved.
Advanced process control of the critical dimension in photolithography
(2008-01-01)
Wu, Chien-Feng
;
Hung, Chih-Ming
;
Chen, Juhn-Horng
;
Lee, An-Chen
;
機械工程學系
This paper describes two run-to-run controllers, a nonlinear multiple exponential-weight moving-average (NMEWMA) controller and a dynamic model-tuning minimum-variance (DMTMV) controller, for photolithography processes. The relationships between the input recipes (exposure dose and focus) and output variables (critical dimensions) were formed using an experimental design method, and the photolithography process model was built using a multiple regression analysis. Both the NMEWMA and DMTMV controllers could update the process model and obtain the optimal recipes for the next run. Quantified improvements were obtained from simulations and real photolithography processes.
Run-by-run process control of metal sputter deposition: Combining time series and extended kalman filter
(2007-08-01)
Chen, Juhn-Horng
;
Kuo, Tzu-Wei
;
Lee, An-Chen
;
機械工程學系
;
Department of Mechanical Engineering