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Browsing by Author "Huang, Shao-Chia"

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    Reliable Doping Technique for WSe2 by W: Ta Co-Sputtering Process
    (2016)
    Chien, Po-Yen
    ;
    Zhang, Ming
    ;
    Huang, Shao-Chia
    ;
    Lee, Min-Hung
    ;
    Hsu, Hung-Ru
    The electrical and material properties of WSe2 doped by W:Ta co-sputtering process were examined. High acceptor doping concentration (6x10(13)cm(-2)) and good effective hole mobility (16.5cm(2)/Vs) were realized. As a result, low sheet resistance (17k Omega/sq) and contact resistance with Pd metal (11.4k Omega-mu m) were measured using TLM structures.