Browsing by Author "Hung, Shao-Kang"

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3D-Printed Linear Positioner with Micrometer Accuracy
(2017-01-01)
Kuo, Yin-Yen
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Cheng, Chiao-Hua
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Hung, Shao-Kang
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機械工程學系
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Department of Mechanical Engineering
This article presents a positioner, whose flexure main body is made by a commercial 3D printer. Using this method, manufacturing a positioner can be cost efficient and much easier to customize. Integrating a laser displacement sensor, an electromagnetic actuator, and a feedback controller, this positioning system has 100 micron translational stroke with 1 micron resolution. Experiments also demonstrate sinusoidal motions at different frequencies. Using the method developed by this article, micro-positioners with customized specifications can be implemented rapidly, iteratively, and cost-effectively.
A New Design of a Submicropositioner Utilizing Electromagnetic Actuators and Flexure Mechanism
(2010-01-01)
Chen, Mei-Yung
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Huang, Hsuan-Han
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Hung, Shao-Kang
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機械工程學系
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Department of Mechanical Engineering
In this paper, a novel XY-dimensional submicropositioner, including mechanism, control, and analysis, is successfully presented. The design of the submicropositioner utilizes a monolithic parallel flexure mechanism with built-in electromagnetic actuators and optical sensors to achieve the object of 3-DOF precise motion. From the provided experimental results, there are several main goals that have been achieved in this paper: 1) to integrate the electromagnetic actuator and the parallel flexure mechanism for planar positioning system; 2) to establish the mathematical modeling; 3) to develop an advanced adaptive sliding-mode controller; and 4) to perform extensive experiments to test the realistic performance.
A Piezoelectric Two-Degree-of-Freedom Nanostepping Motor with a Positioning Sensor
(2018-01-01)
Cheng, Chiao-Hua
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Hung, Shao-Kang
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機械工程學系
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Department of Mechanical Engineering
The design of the proposed piezoelectric two-degree-of-freedom nanostepping motor is driven by the principle of stick-slip. The proposed design not only improves the control of clamping force when the stick-slip cycle is working but adds a position sensing detector (PSD) to record translational distance and rotational angle simultaneously. In general, one degree of freedom needs one sensor to record position information, but a PSD can measure two degrees of freedom simultaneously in this paper. Due to the photosensing element PSD, more applications can be applied in future, such as feedback control for precise positioning.
A Piezoelectric Two-Degree-of-Freedom Nanostepping Motor With Parallel Design
(2016-08)
Cheng, Chiao-Hua
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Hung, Shao-Kang
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機械工程學系
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Department of Mechanical Engineering
This letter proposes a parallel design for a piezoelectric two-degree-of-freedom nanostepping motor, which performs translation or rotation while its two piezoelectric elements are driven in-phase or out-of-phase electrically. Compared to serialmechanism, parallel designs are more compact, stiffer, and have better dynamical characteristics. Experimental results show that this device works stably. The stepping resolution/stroke values of translation and rotation are 100 nm/6 mm and 0.04 degrees/infinite, respectively.
A range-extended displacement sensor using a quartz tuning fork
(2010)
Lu, Yi
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Cheng, Chiao-Hua
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Chen, Li-Kang
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Hung, Shao-Kang
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機械工程學系
A quartz tuning fork is a kind of piezoelectric resonators. Quartz tuning forks can be modified as sensors to measure various properties, such as force, acceleration, displacement, and many other ones. A method to extend the measurable range of a quartz tuning fork based displacement sensor is devised in this paper. The experimental results demonstrate that the linear measurable range of the proposed displacement sensor is 17.6 mu m.
A TEM phase plate loading system with loading monitoring and nano-positioning functions
(2010-08-01)
Shiue, Jessie
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Hung, Shao-Kang
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機械工程學系
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Department of Mechanical Engineering
We present a phase plate loading system developed for a commercial transmission electron microscope (TEM). Our system can be installed without modifying the optical design of the TEM. This system is equipped with a loading monitoring set that allows users to easily and safely locate the phase plate between the pole pieces, and also comes with an airlock that permits quick loading of a phase plate without the need to re-vent the TEM column. The system uses a home-made three-axis nano-positioner to precisely position the phase plate hole at the desired location. Our system has a precision of similar to 10 nm, an improvement of one order of magnitude compared with the precision of a phase plate holder modified from an objective aperture. We demonstrate the successful installation and the use of the loading system to place a phase plate at the desired position. Our phase plate loading system can be used to accommodate various types of phase plates and thus provides a good way to greatly speed up the development of TEM phase plates. (C) 2010 Elsevier B.V. All rights reserved.
Automatic assembly of quartz tuning fork and microcantilever
(2012)
Cheng, Chiao-Hua
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Chen, Jian-Hua
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Shieh, Jen-Yu
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Hung, Shao-Kang
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機械工程學系
Conventional atomic force microscopes (AFMs) detect microcantilever deflection using an optical lever system. However, the complex mechanism of the optical lever system and the alignment of the laser spot on the microcantilever prevent such AFM systems from scanning large samples. AFM systems using a quartz tuning fork (QTF) as a force sensor have been proven feasible, and enhance compactness of the AFM system. This paper presents the automatic assembly of the QTF sensor and the microcantilever of commercial AFM probe using a visual servo method.
Automatic-Patterned Sapphire Substrate Nanometrology Using Atomic Force Microscope
(2015-03-01)
Hung, Shao-Kang
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Cheng, Chiao-Hua
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Chen, Cheng-Lung
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機械工程學系
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Department of Mechanical Engineering
Light emitting diodes become brighter because of the contribution of patterned sapphire substrates (PSS). The dimensions of PSS crucially affect its performance. The most suitable instrument to measure PSS is atomic force microscope, which provides three-dimensional surface profiles. This paper proposes an automatic method to analyze AFM-collected raw data and produce characteristic parameters of PSS, including height, diameters, pitch, and side angles. Experimental results show that this method has good repeatability of 1.2 and 6.3 nm on measuring height and bottom diameter, respectively. This nanometrology method will be extensively applicable for similar nanostructures with periodic patterns.
Design and Analysis of a 2-DOF Planar Nano-positioner with Low Parasitic Rotation
(2014)
Lin, Hung-Ruei
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Hung, Shao-Kang
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Cheng, Chiao-Hua
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機械工程學系
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Department of Mechanical Engineering
This paper presents the design processes and performance of a new piezoactuated nano-positioner with low parasitic rotation. The flexure-based stage is composed of two symmetric flexure guiding mechanisms and two piezo stack actuators (PSAs) which have a 45 degree angle with X and Y directions. By analyzing the layout of the stage with kinematics and finite element analysis (FEA) results, it shows that this novel design offers a characteristic of low parasitic rotation. Analytical models of PSAs and stage are derived to assess the performances and to decide the parameters of geometry sizes of the hinge and the stage, total stroke, maximum von-Mises stress, and lifetime. A prototype of the stage is then fabricated, and its performances are tested. Two laser displacement sensors and PID control method are used to achieve a feedback control of the system. Experimental results reveal that the stage has stroke of 500 mu m x 500 mu m, resolution of 10 nm, and maximum parasitic rotation of 0.48 arc sec under stroke of +/- 50 mu m.
Design and Experiment of a Macro-Micro Planar Maglev Positioning System
(2012-11-01)
Chen, Mei-Yung
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Lin, Tzuo-Bo
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Hung, Shao-Kang
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Fu, Li-Chen
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交大名義發表
In this paper, a new planar magnetic levitation (maglev) positioning system is proposed, which is capable of executing dual-axis planar motions purely involving magnetic forces. Functionally, such a mechanism behaves like a planar XY table with micrometer precision. Specifically, in this system, a new structure with an adaptive sliding-mode control (ASMC) algorithm is described, which aims to achieve the following three goals: 1) a large moving range (millimeter level); 2) precise positioning (micrometer level); and 3) fast response. The system consists of a moving carrier platform, six permanent magnets (PMs) attached to the carrier, and six electromagnets mounted on a fixed base. After exploring the characteristics of the magnetic forces between PMs and electromagnets, the general 6-DOF dynamic model of this system is derived and analyzed. Then, because of the naturally unstable behavior inherent in maglev systems, the proposed ASMC guarantees satisfactory performance of the maglev system. Experiments have successfully demonstrated the feasibility and effectiveness of the overall system.
Design and quasi-static characteristics study on a planar piezoelectric nanopositioner with ultralow parasitic rotation
(2015-10-01)
Lin, Hung-Ruei
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Cheng, Chiao-Hua
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Hung, Shao-Kang
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機械工程學系
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Department of Mechanical Engineering
This paper presents a particular mechanism design which is inherently inclined to have no parasitic rotation. The flexure-based stage comprises symmetric flexure guiding mechanism and two piezoelectric stack actuators. The layout of the stage is evaluated by finite element analysis, and the results indicate that the proposed design exhibits ultralow parasitic rotation. A prototype of the stage is then fabricated, and its performance is tested. Experimental results show that the stage has a stroke of 500 mu m x 500 mu m and the crosstalk is less than 1%. The maximum parasitic rotation is +/- 1.2 arcsec at a stroke of 500 mu m. (C) 2015 Elsevier Ltd. All rights reserved.
Design of a dual-probe profilometer
(2014)
Cheng, Chiao-Hua
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Hung, Shao-Kang
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Lin, Chih-Hsien
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機械工程學系
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Department of Mechanical Engineering
This paper proposes a design of a dual-probe profilometer, which successfully utilizes a compensation method with two probe modules to scan a 200 nm step height standard sample with 5% scanning error. Compared with traditional profilometers, this design possesses high scanning precise performance without using large and heavy optical flats to increase the flatness when sample stage is moving. The experimental results show the compensation method is valid and can be applied in nano-scale scanning.
[INVITED] Total-internal-reflection-based photomask for large-area photolithography
(2016-05)
Hung, Shao-Kang
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Lin, Kung-Hsuan
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Chen, Cheng-Lung
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Chou, Chen-Hsun
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Lin, You-Chuan
Photolithography has been widely implemented with a photomask in contact or in close proximity to the photoresist layer. The flatness of the substrates is a crucial factor to guarantee the quality of the entire patterned photoresist (PR) layer especially for large-area photolithography. However, some substrates, such as sapphire wafers, do not possess highly uniform thickness as silicon wafer does. In this work, we demonstrate that a flexible polydimethylsiloxane (PDMS) photomask with optical total-internal-reflection structure can effectively circumvent this problem for mass production. Different from conventional photomask that the light is blocked by the patterned reflective/absorbing materials, the distributions of light intensity on the PR is engineered by the geometric structure of the transparent PDMS photomask. We demonstrate that 4 in. patterned sapphire wafers can be successfully fabricated by using this PDMS photomask, which can be easily integrated into the present techniques in industry for mass production of substrates for GaN-based optoelectronic devices. (C) 2015 Elsevier Ltd. All rights reserved.
Optimum Electric Cable Selection for Kite-like Unmanned Aerial Vehicle
(2015)
Wang, Ko-Yuan
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Lee, Pei-Hsuan
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Hung, Shao-Kang
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機械工程學系
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Department of Mechanical Engineering
A kite-like unmanned aerial vehicle (UAV) is leashed by a taut tether, which supplies electric power from the ground battery. Although working range is restricted, the flight time is extended significantly. Long endurance is a necessary condition for serious UAV missions. In this paper, a payload model of kite-like UAV is developed by measuring electrical and mechanical characteristics of the UAV\'s propulsion unit. After investigating the model, there exits an optimum electric cable selection to achieve maximum payload capacity or highest flying altitude. Simulation results indicate the proper electric cable selection is crucial for kite-like UAV.
Spiral Scanning Method for Atomic Force Microscopy
(2010-07-01)
Hung, Shao-Kang
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機械工程學系
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Department of Mechanical Engineering
A spiral scanning method is proposed for atomic force microscopy with thoroughgoing analysis and implementation. Comparing with the traditional line-by-line scanning method, the spiral scanning method demonstrates higher imaging speed, minor image distortion, and lower acceleration, which can damage the piezoelectric scanner. Employing the spiral scanning method to replace the line-by-line scanning method, the experiment shows that the time to complete an imaging cycle can be reduced from 800 s to 314 s without sacrificing the image resolution.
The design and characteristic research of a dual-mode inertia motor
(2011)
Cheng, Chiao-Hua
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Hung, Shao-Kang
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機械工程學系
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Department of Mechanical Engineering
The design of a dual-mode inertia motor involves an actuator that can generate translational and rotational motion without connecting the actuators serially. Traditionally, translational or rotational actuators should be stacked serially to have multi-axis degrees-of-freedom. The experimental results of this study display performance characteristics such as linearity, resolution, velocity and the most excellent operating frequency.
Transforming a CD/DVD Pick-up-head into an Accelerometer
(2009)
Chieh, Jih-Wei
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Hung, Shao-Kang
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機械工程學系
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Department of Mechanical Engineering
An accelerometer based on a commercial CD/DVD pick-up-head is proposed in this paper. A CD/DVD pick-up-head becomes an accelerometer by transforming the astigmatic measuring mechanism, the suspending wires, and the objective lens as the displacement sensor, the spring, and the seismic mass, respectively. The experiments demonstrate that this cost-effective accelerometer has excellent linearity, ultra high sensitivity of 114 V/g, and an operating frequency of 20 Hz.
Transforming an Optical Flow Sensor into an Angular Displacement Sensor
(2019-01-01)
Lu, Chao-Yang
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Hung, Shao-Kang
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機械工程學系
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Department of Mechanical Engineering
In this study, we used the common and low-cost optical flow sensor as the core of image processing. We simply adopted a set of designed discs with pattern sticker on it as a disc-shaped reader to transfer the angle variation (rotation) to a linear motion. Angle variation is obtained using lower cost sensors. Therefore, significantly reduction of the manufacturing cost of the grating, which is inside the optical angle encoder could be made. Angle sensors can be used more widely and universally in a wide variety of designs in the foreseeable future.
Transforming an Optical Pick-up-Head into an Accelerometer With UltraHigh Sensitivity
(2014-03-01)
Hung, Shao-Kang
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Cheng, Chiao-Hua
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Chiang, Ming-Li
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Chieh, Jih-Wei
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機械工程學系
This paper proposes an accelerometer based on a commercial optical pick-up-head (PUH). An optical PUH is used to be part of an accelerometer by transforming the astigmatic measuring mechanism, the suspending wires, and the objective lens as the displacement sensor, the spring, and the seismic mass, respectively. Instead of adding an extra mass-damper-spring subsystem into the system in previous works, in our design we utilize the four suspending metal wires and the objective lens in an optical PUH. Thus, no extra component is needed and the system is more compact and easy to implement. Experimental results demonstrate that this cost-effective accelerometer has excellent linearity, ultrahigh sensitivity of 114 V/g, and an operating frequency of 20 Hz.
Visual Servo Control System of a Piezoelectric 2-Degree-of-Freedom Nano-Stepping Motor
(2019-12-01)
Chen, Cheng-Lung
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Hung, Shao-Kang
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機械工程學系
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Department of Mechanical Engineering
A nano-stepping motor can translate or rotate when its piezoelectric element pair is electrically driven in-phase or anti-phase. It offers millimeter-level stroke, sub-micron-level stepping size, and sub-nanometer-level scanning resolution. This article proposes a visual servo system to control the nano-stepping motor, since its stepping size is not consistent due to changing contact friction, using a custom built microscopic instrument and image recognition software. Three kinds of trajectories straight lines, circles, and pentagrams are performed successfully. The smallest straightness and roundness ever tested are 0.291 mu m and 2.380 mu m. Experimental results show that the proposed controller can effectively compensate for the error and precisely navigate the rotor along a desired trajectory.