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Browsing by Author "Jhuo, Long-Cai"

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    Micro-Plasma Device Utilizing SU-8 Photoresist as a Barrier Rib
    (2006)
    Jhuo, Long-Cai
    ;
    Kim, Sung-O
    ;
    光電工程學系
    ;
    Department of Photonics
    A newly designed micro-plasma device using SU-8 photoresist as a barrier rib has been successfully fabricated and characterized. Operating in neon gas at pressure from 300 to 800 Torr and having hexagonal structure, 5x5 arrays of micro-plasma device have been investigated. The driving voltaged is lower than 250 V.