Micro-Plasma Device Utilizing SU-8 Photoresist as a Barrier Rib
Loading...
Date
Authors
Journal Title
Journal ISSN
Volume Title
Publisher
DOI
Abstract
A newly designed micro-plasma device using SU-8 photoresist as a barrier rib has been successfully fabricated and characterized. Operating in neon gas at pressure from 300 to 800 Torr and having hexagonal structure, 5x5 arrays of micro-plasma device have been investigated. The driving voltaged is lower than 250 V.