標題: | Micro-Plasma Device Utilizing SU-8 Photoresist as a Barrier Rib |
作者: | Jhuo, Long-Cai Kim, Sung-O 光電工程學系 Department of Photonics |
公開日期: | 2006 |
摘要: | A newly designed micro-plasma device using SU-8 photoresist as a barrier rib has been successfully fabricated and characterized. Operating in neon gas at pressure from 300 to 800 Torr and having hexagonal structure, 5x5 arrays of micro-plasma device have been investigated. The driving voltaged is lower than 250 V. |
URI: | http://hdl.handle.net/11536/17366 |
ISSN: | 1738-7558 |
期刊: | IMID/IDMC 2006: THE 6TH INTERNATIONAL MEETING ON INFORMATION DISPLAY/THE 5TH INTERNATIONAL DISPLAY MANUFACTURING CONFERENCE, DIGEST OF TECHNICAL PAPERS |
起始頁: | 21 |
結束頁: | 23 |
顯示於類別: | 會議論文 |