標題: | Microplasma device utilizing SU-8 photoresist as a barrier rib |
作者: | Kim, Sung-O 光電工程學系 顯示科技研究所 Department of Photonics Institute of Display |
關鍵字: | microdischarge |
公開日期: | 1-八月-2008 |
摘要: | A Microplasma device utilizing SU-8 photoresist as a barrier rib has been fabricated and characterized operating in the abnormal mode for neon pressures from 300 to 800 torr and having a hexagonal structure, 5 x 5 arrays of microplasma. The microplasma device, which has a simple fabrication process, offers advantages such as low firing voltage, low cost, and stable glow discharge. The electrical properties have been examined by bipolar voltage waveforms with different frequencies. The geometric patterns of the barrier rib can be simply changed by lithographic techniques. |
URI: | http://dx.doi.org/10.1109/TPS.2008.922939 http://hdl.handle.net/11536/8509 |
ISSN: | 0093-3813 |
DOI: | 10.1109/TPS.2008.922939 |
期刊: | IEEE TRANSACTIONS ON PLASMA SCIENCE |
Volume: | 36 |
Issue: | 4 |
起始頁: | 1244 |
結束頁: | 1245 |
顯示於類別: | 期刊論文 |