氬氣/氖氣操作之尖端電極增強型微電漿元件之特性研究

Abstract

微電漿元件的研究近來提供了許多相當引人注目的特性與可能的應用。微電漿元件科技是結合電漿科學，光電科學與材料科學的一個新領域，並提供了電漿科學一個新發展空間。專門提供探討微電漿科技的研討會(IWM, International Workshop on Microplasmas)也在近年發展並漸有規模。目前在發展微電漿元件上有兩個主要的方向: (1)觀察電漿在微米尺寸與奈米尺寸之下的物理現象與光電特性，(2)發展不同結構與材料來使得微電漿可以與光電科技等不同領域作整合應用。 本篇論文闡述尖端電極增強型微電漿元件在氬氣/氖氣操作環境下的特性研究成果。在微電漿元件中採用尖端是希望利用其提升局部電場強化，進一步降低電漿崩解電壓。實驗包含建構一高真空系統以提供電漿操作環境、元件製程、量測電性與光學影像。經由實驗結果，穩定電壓電流特性、低操作電壓、大驅動裕度(Margin)、穩定輝光放電現象均可以由本研究之微電漿元件得到。本論文中所得到的元件特性展現尖端電極增強型微電漿元件與其他領域整合應用的充分潛力。

Recently, microplasma devices afford attractive properties and possible applications. The growth of the topical conferences on microplasma reveals the potential of development. Microplasma science and technology which is at the intersection of plasma science, photonics and materials science offers a new realm of plasma application. Two main tendencies in the development of microplasma devices: (1) to investigate the physics of ionized plasmas in micro or nano scale plasma devices, (2) to develop structural configurations and materials that allow microplasma to be integrated with electro-optical components. The aim of this article attempts to characterize the nano-tip enhanced panel type microplasma device in argon and neon gases. The main idea for adopting nano-tips in the microplasma device is to enhance the electric field. Results of this study showed that abnormal current-voltage characteristics, low operating voltages, large voltage margins, and stable glow discharges can be observed by the proposed microplasma devices. To conclude, with the advantages from proposed device, the nano-tip enhanced microplasma technology provides possible opportunity to integrate with broad applications.