Microplasma devices with nano-tip enhanced electrodes operated in Ar and Ne gases for plasma light source application

Abstract

Microplasma devices with nano-tip electrodes have been fabricated and operated successfully in Ar and Ne gases. The nano-tip locally enhances the electronic field. Current-voltage characteristics of microplasma devices have been examined by direct current bipolar pulsed waveform with different frequencies from 2 to 20 kHz in 300 - 800 Torr of Ar, Ne and Ne+Ar(2%). With all the advantages, the nano-tip enhanced microplasma technology provides possible opportunity to integrate to flat plasma light source.