標題: | Diamond-shaped microplasma device using thick photoresist as a barrier rib in Ne-Ar gas mixtures |
作者: | Kim, Sung-O 光電工程學系 顯示科技研究所 Department of Photonics Institute of Display |
關鍵字: | glow discharge;microdischarge |
公開日期: | 1-八月-2008 |
摘要: | The discharge characteristics of the diamond-shaped microplasma devices with pure neon, neon-1% argon, and neon-5% argon gas mixtures are investigated. The 5 x 5 arrays of diamond-shaped microplasma devices operating at pressures from 300 to 800 torr have been characterized. The diamond-shaped microplasma devices, offer advantages such as having a high yield process, low ignition voltage, stable glow discharge, and low cost. The electrical properties of neon discharges have been examined with different argon fractions. The diamond-shaped microplasma device operates at voltages as low as 190 V, at 800 torr. |
URI: | http://dx.doi.org/10.1109/TPS.2008.922936 http://hdl.handle.net/11536/8544 |
ISSN: | 0093-3813 |
DOI: | 10.1109/TPS.2008.922936 |
期刊: | IEEE TRANSACTIONS ON PLASMA SCIENCE |
Volume: | 36 |
Issue: | 4 |
起始頁: | 1242 |
結束頁: | 1243 |
顯示於類別: | 期刊論文 |