Diamond-shaped microplasma device using thick photoresist as a barrier rib in Ne-Ar gas mixtures

doi:10.1109/TPS.2008.922936

完整後設資料紀錄

DC 欄位	值	語言
dc.contributor.author	Kim, Sung-O	en_US
dc.date.accessioned	2014-12-08T15:11:09Z	-
dc.date.available	2014-12-08T15:11:09Z	-
dc.date.issued	2008-08-01	en_US
dc.identifier.issn	0093-3813	en_US
dc.identifier.uri	http://dx.doi.org/10.1109/TPS.2008.922936	en_US
dc.identifier.uri	http://hdl.handle.net/11536/8544	-
dc.description.abstract	The discharge characteristics of the diamond-shaped microplasma devices with pure neon, neon-1% argon, and neon-5% argon gas mixtures are investigated. The 5 x 5 arrays of diamond-shaped microplasma devices operating at pressures from 300 to 800 torr have been characterized. The diamond-shaped microplasma devices, offer advantages such as having a high yield process, low ignition voltage, stable glow discharge, and low cost. The electrical properties of neon discharges have been examined with different argon fractions. The diamond-shaped microplasma device operates at voltages as low as 190 V, at 800 torr.	en_US
dc.language.iso	en_US	en_US
dc.subject	glow discharge	en_US
dc.subject	microdischarge	en_US
dc.title	Diamond-shaped microplasma device using thick photoresist as a barrier rib in Ne-Ar gas mixtures	en_US
dc.type	Article	en_US
dc.identifier.doi	10.1109/TPS.2008.922936	en_US
dc.identifier.journal	IEEE TRANSACTIONS ON PLASMA SCIENCE	en_US
dc.citation.volume	36	en_US
dc.citation.issue	4	en_US
dc.citation.spage	1242	en_US
dc.citation.epage	1243	en_US
dc.contributor.department	光電工程學系	zh_TW
dc.contributor.department	顯示科技研究所	zh_TW
dc.contributor.department	Department of Photonics	en_US
dc.contributor.department	Institute of Display	en_US
dc.identifier.wosnumber	WOS:000258618200191	-
dc.citation.woscount	0	-
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