Nanotip-enhanced microplasma devices

Abstract

Nanotip-enhanced microplasma devices have been successfully fabricated and operated with neon gas at room temperature. The panel-type microplasma device included nanotip and metal electrodes on the rear panel, which provided low discharge voltage, strong emission, and stable discharge phenomena. The nanotip with a radius below 10 nm enhances the electrical field distribution density. The electrical properties of neon discharges have been examined with pulsed waveforms from 2 to 20 kHz in neon with pressures from 4 x 10(4) to 10(5) Pa.