Diamond-shaped microplasma device using thick photoresist as a barrier rib in Ne-Ar gas mixtures

Abstract

The discharge characteristics of the diamond-shaped microplasma devices with pure neon, neon-1% argon, and neon-5% argon gas mixtures are investigated. The 5 x 5 arrays of diamond-shaped microplasma devices operating at pressures from 300 to 800 torr have been characterized. The diamond-shaped microplasma devices, offer advantages such as having a high yield process, low ignition voltage, stable glow discharge, and low cost. The electrical properties of neon discharges have been examined with different argon fractions. The diamond-shaped microplasma device operates at voltages as low as 190 V, at 800 torr.