標題: Micro-Plasma Device Utilizing SU-8 Photoresist as a Barrier Rib
作者: Jhuo, Long-Cai
Kim, Sung-O
光電工程學系
Department of Photonics
公開日期: 2006
摘要: A newly designed micro-plasma device using SU-8 photoresist as a barrier rib has been successfully fabricated and characterized. Operating in neon gas at pressure from 300 to 800 Torr and having hexagonal structure, 5x5 arrays of micro-plasma device have been investigated. The driving voltaged is lower than 250 V.
URI: http://hdl.handle.net/11536/17366
ISSN: 1738-7558
期刊: IMID/IDMC 2006: THE 6TH INTERNATIONAL MEETING ON INFORMATION DISPLAY/THE 5TH INTERNATIONAL DISPLAY MANUFACTURING CONFERENCE, DIGEST OF TECHNICAL PAPERS
起始頁: 21
結束頁: 23
Appears in Collections:Conferences Paper