Browsing by Author "Joshi, Abhijeet"

Now showing 1 - 2 of 2

Boosting Ge-epi N-well Mobility with Sn Implantation and P-well Mobility with Cluster-C Implantation
(2018-01-01)
Borland, John
;
Chaung, Shang-Shiun
;
Tseng, Tseung-Yuen
;
Lee, Yao-Jen
;
Joshi, Abhijeet
We investigated the effects of Sn, Si and cluster-C implantation into both P-well and N-well doped regions of 100nm Ge-epilayer on Si wafers after RTA annealing. For the P-well case a 7.3x increase in Hall bulk mobility to 3384cm(2)/Vs with cluster-C implant and for the N-well case a 4.6x increase in Hall bulk mobility to 2062cm(2)/Vs with Sn implant. Measuring layer mobility depth profiles shows mobility in the top 10-20nm of the surface can be up to 6000cm(2)/Vs for N-well with Sn implant and >10,000cm(2)/Vs for P-well with Sn implant.
Comparing RTA and Laser SPE & LPE Annealing of Ge-epi with Si, Sn & C Implantation for Well Mobility/Strain Engineering
(2019-01-01)
Borland, John
;
Chaung, Shang-Shuin
;
Tseng, Tseung-Yuen
;
Joshi, Abhijeet
;
Basol, Bulent