Browsing by Author "LIN, MZ"
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Item type:Item, A NEW LATERAL GROWTH FREE FORMATION TECHNIQUE FOR TITANIUM SILICIDE USING THE SI/W/TI TRILAYER STRUCTURE(1988-09-01)Item type:Item, AN ENVIRONMENT-INSENSITIVE TRILAYER STRUCTURE FOR TITANIUM SILICIDE FORMATION(1986-11-01)Item type:Item, COBALT SILICIDE INTERCONNECTION FROM A SI/W/CO TRILAYER STRUCTURE(1989-01-01)