Browsing by Author "Lee, Yen-Chi"

Now showing 1 - 2 of 2

Effect of ion-milled barriers on electron transport in micrometer-sized tunnel junctions
(2014-03-12)
Lee, Yen-Chi
;
Lin, Yong-Han
;
Wu, Jong-Ching
;
Lin, Juhn-Jong
;
電子物理學系
We studied the electron transport properties of micrometre-sized all-Al tunnel junctions (TJs) between 2 and 300 K, in which the AlOx layer grown by O-2 plasma was moderately Ar-ion-milled prior to top electrode deposition. In contrast to the direct tunnelling in the TJs whose barriers are intact (not ion-milled), the zero-bias conductances and the current-voltage characteristics of the TJs as processed are found to be best described by the fluctuation-induced tunnelling conduction mechanism. This observation indicates the formation of nanoscopic incomplete pinholes in the AlOx layer, owing to large junction-barrier interfacial roughness introduced by the ion-milling process. Topographical features revealed by the cross-sectional transmission electron microscopy imaging of the TJ stack conform to this result. This study is of relevance to cases in which ion-milling techniques are applied in tailoring the TJ properties.
Through-Silicon-Via-Based Double-Side Integrated Microsystem for Neural Sensing Applications
(2013-01-01)
Chang, Chih-Wei
;
Huang, Po-Tsang
;
Chou, Lei-Chun
;
Wu, Shang-Lin
;
Lee, Shih-Wei