Browsing by Author "Lin, SJ"

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Analysis of a grating metal structure with broad back-scattering field pattern for applications in vehicle collision avoidance system
(2002-01-01)
Chou, YH
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Lin, SJ
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Chung, SJ
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電信工程研究所
;
Institute of Communications Engineering
In this paper, grating metal structures with broad and flat back-scattering field patterns are studied for possible applications in a vehicle collision avoidance system. The two-dimensional TE scattering of a planar grating structure and a curved grating structure are analyzed at a frequency of 77 GHz. For the planar structure, the method of moment together with Floquet's theorem is used to solve the induced current and the resultant back-scattering field. Based on the results of the planar structure, the scattering field of the curved grating structure is obtained by using a perturbation method. The influence on the field pattern of the curvature as well as other structure parameters, such as the width and geometry of each period in the grating structure, is investigated.
Effects of post CF(4) plasma treatment on the HfO(2) thin film
(2005-04-01)
Lai, CS
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Wu, WC
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Fan, KM
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Wang, JC
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Lin, SJ
In this study, a novel approach was proposed to improve the characterization of HfO(2). Fluorine was incorporated by CF(4) plasma to improve the HfO(2) gate dielectric properties including leakage current, breakdown voltage and hysteresis. The hysteresis of capacitance-voltage characteristics can be reduced to approximately 10% hysteresis voltage for the samples with CF(4) plasma treatment. An inner-interface trapping model is presented to explain the hysteresis. The secondary-ion mass spectroscopy (SIMS) results show that there is a significant incorporation of fluorine (F) at the interface between the HfO(2) thin film and silicon substrate. The incorporation of F effectively suppressed leakage current and improved carrier trapping without an increase in interfacial layer thickness.
Impact of air filter material on metal oxide semiconductor (MOS) device characteristics in HF vapor environment
(2004-05-15)
Hsiao, CW
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Lou, JC
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Yeh, CF
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Hsieh, CM
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Lin, SJ
Airborne molecular contamination (AMC) is becoming increasingly important as devices are scaled down to the nanometer generation. Optimum ultra low penetration air (ULPA) filter technology can eliminate AMC. In a cleanroom, however, the acid vapor generated from the cleaning process may degrade the ULPA filter, releasing AMC to the air and the surface of wafers, degrading the electrical characteristics of devices. This work proposes the new PTFE ULPA filter, which is resistant to acid vapor corrosion, to solve this problem. Experimental results demonstrate that the PTFE ULPA filter can effectively eliminate the AMC and provide a very clean cleanroom environment.
Impact of airborne molecular contamination to nano-device performance
(2002)
Yeh, CF
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Hsiao, CW
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Lin, SJ
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Xie, ZM
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Kusumi, T
In this paper, we detected most airborne molecular contamination (AMC) in present cleanroom and in our specially equipped clean bench through air sampling and wafer sampling experiments. And then we investigate the AMC on device performance under different filter modules. We discovered that the NEUROFINE PTFE filter combines with the chemical filters have excellent controlling ability of metal, organic and inorganic contaminations. We believe that the novel filter combination can be used to further improve device manufacturing environment when device is continuously scaled down to nanometer generation.
On the architecture and performance of blueweb: A bluetooth-based multihop ad hoc network
(2006-02-01)
Yu, CM
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Lin, SJ
;
Huang, CC
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電信工程研究所
;
Institute of Communications Engineering
In this paper, we present Blueweb, a new Bluetooth-based multihop network with an efficient scatternet formation algorithm and a hybrid routing protocol. The Blueweb is designed from the original idea of Bluetree. Blueweb's scatternet formation uses two mechanisms. One is the role exchange mechanism in which only slave nodes serve as the role of relay through the whole scatternet. The other one is the return connection mechanism in which we convert the scatternet from a tree-shaped to a web-shaped topology. Meanwhile, a modified source routing protocol is designed for Blueweb in which we combine the proactive method with the reactive method to discover the optimal path for packet transmission. Furthermore, using computer simulations we compared the system performance of Blueweb and Bluetree with both a static model and a uniform traffic model. With the static model we evaluate the scatternet performance and with the uniform traffic model we evaluate the transmission performance. Our simulation results show that Blueweb achieves superior system performance than Bluetree on both scatternet performance and transmission performance.
The removal of airborne molecular contamination in cleanroom using PTFE and chemical filters
(2004-05-01)
Yeh, CF
;
Hsiao, CW
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Lin, SJ
;
Hsieh, CM
;
Kusumi, T
Cleanroom contamination and its impact on the performance of devices are beginning to be investigated due to the increasing sensitivity of the semiconductor manufacturing process to airborne molecular contamination (AMC). A clean bench was equipped with different filter modules and then most AMC in the cleanroom and in the clean bench was detected through air-sampling and wafer-sampling experiments. Additionally, the effect of AMC on device performance was examined by electrical characterization. A combination of the NEUROFINE PTFE filter and chemical filters was found to control metal, organic, and inorganic contamination. We believe that the new combination of filters can be used to improve the manufacturing environment of devices, which are being continuously shrunk to the nanometer scale.
Voltage collapse detection of a power system based on the FIDF technique
(2005)
Liang, YW
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Liu, HY
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Xu, SD
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Lin, SJ
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電控工程研究所
In this paper, an effective linear-based fault identification filter (FIDF) design technique is applied to voltage collapse detection in a power system so that a corrective action can be made at the onset of unstable phenomena. This is achieved by treating the difference between the load voltage of the power system and that of its linearized model at a stable operating point as a fault vector and then investigating the effect of the fault on the designed FIDE. In practical applications, since FIDF has a low pass filter property and is easily calculated, it can effectively attenuate the influences of high frequency measurement noises and be employed as an on-line detection scheme. Simulation results for Dobson and Chiang's power system model (1990) are finally given to demonstrate the effectiveness of the FIDE design.