Impact of airborne molecular contamination to nano-device performance

Abstract

In this paper, we detected most airborne molecular contamination (AMC) in present cleanroom and in our specially equipped clean bench through air sampling and wafer sampling experiments. And then we investigate the AMC on device performance under different filter modules. We discovered that the NEUROFINE PTFE filter combines with the chemical filters have excellent controlling ability of metal, organic and inorganic contaminations. We believe that the novel filter combination can be used to further improve device manufacturing environment when device is continuously scaled down to nanometer generation.