Browsing by Author "Minh-Thien-Huu Ha"

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Growth of ultrathin GaSb layer on GaAs using metal-organic chemical vapor deposition with Sb interfacial treatment
(2016-09)
Hsiao, Chih-Jen
;
Minh-Thien-Huu Ha
;
Hsu, Ching-Yi
;
Lin, Yueh-Chin
;
Chang, Sheng-Po
GaSb epitaxial layers were directly grown on GaAs substrates by metal-organic chemical vapor deposition involving Sb interfacial treatment with optimized growth temperature and V/III ratio. The interfacial treatment effectively reduces the surface energy and strain energy difference, resulting in a quasi-2D growth mode. When the GaSb layer was grown at 520 degrees C, the strain induced by lattice mismatch was accommodated by 90 degrees dislocations with a period of 5.67 nm. By optimizing the V/III ratio, the surface roughness of the ultrathin GaSb/GaAs heterostructure was reduced, resulting in a reduced carrier scattering and improved electronic properties. (C) 2016 The Japan Society of Applied Physics
Performance improvement of highly mismatched GaSb layers on GaAs by interfacial-treatment-assisted chemical vapor deposition
(2017-01)
Hsiao, Chih-Jen
;
Minh-Thien-Huu Ha
;
Liu, Chun-Kuan
;
Hong-Quan Nguyen
;
Yu, Hung-Wei
Strain-relieved GaSb quantum dots on GaAs can be achieved by either periodic interfacial misfit (IMF) or the conventional Stranski-Krastanov (SK) growth modes by changing the growth parameters. In this study, the Sb interfacial treatment was employed to improve the GaSb crystal quality including low defect density, smooth surface morphology, and high hole mobility. This technique yields two-dimensional (2D) islands with a height as low as 1.7 nm and width up to 190 nm in the IMF growth mode. In contrast to the interfacial treatments conventionally employed in the initial strain relaxation of GaSb/GaAs hererostructure, the Sb treatment promotes the formation of strong Ga-Sb bonds on the surface of the grown island, which effectively reduces the interfacial free energy and thus promotes the formation of 2D islands. With the Sb interfacial treatment, a high-relaxation 100-nm GaSb epilayer was grown on the GaAs substrate, the epilayers was strain relaxed and exhibited enhanced electrical properties with a high hole mobility of similar to 667 cm(2) V-1 s(-1) and with superior optical properties as evidenced by the photoluminescence B-line peak. The results of this study demonstrate an effective interfacial-treatment growth technique to relax the initial strain for the highly mismatched GaSb layers grown on a GaAs substrate.
Performance Improvements of AlGaN/GaN HEMTs by Strain Modification and Unintentional Carbon Incorporation
(2015-03-01)
Tien-Tung Luong
;
Binh Tinh Tran
;
Ho, Yen-Teng
;
Minh-Thien-Huu Ha
;
Hsiao, Yu-Lin
An advanced AlGaN/GaN HEMT structure, grown on a sapphire substrate by MOCVD utilizing a high temperature (HT) AN interlayer (IL) and a multilayer high-low-high temperature (HLH) AN buffer layer, demonstrates a superior performance both in breakdown voltage (>200 V) and maximum drain current (Ipss = 667 mA/mm). The HT AN IL produces an additional compressive strain into the above GaN layer. Accordingly, an AlGaN barrier, grown on the more compressive GaN, introduces less tensile strain leading to an improvement in surface morphology (RMS = 0.19 nm in 2 x 2 mu m(2)), a remarkable increase in 2DEG mobility by 46% (mu(S)= 1900 cm(2)/Vs) and a decrease in densities of defects acting as paths for the leakage current through the AlGaN barrier. A high semi-insulating buffer is achieved by eliminating leakage paths both through the buffer layer and the buffer-substrate interfacial layer. These result from an increase in unintentional carbon introduced by AIN layers, especially by a low temperature AN layer; which are grown under low pressure (50 Ton). Lastly, the decrease in AlGaN barrier tensile strain and low leakage current in the advanced HEMTs structure using an HT AN IL and an HLH AIN buffer are promising for an improvement in AlGaN/GaN HEMTs\' reliability.