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Browsing by Author "Pan, Han-Chang"

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    Improved stress reliability of analog TiHfO metal-insulator-metal capacitors using high-work-function electrode
    (2007-11-01)
    Cheng, Chun-Hu
    ;
    Chiang, Kuo-Cheng
    ;
    Pan, Han-Chang
    ;
    Hsiao, Chien-Nan
    ;
    Chou, Chang-Pin
    We have studied the reliability of high-K (K similar to 49) TixHf1-xO (x similar to 0.67) metal-insulator-metal (MIM) capacitors after constant voltage stress induction. The use of a high-work-function Ni top electrode improves not only the leakage current, and temperature- and voltage-coefficients of capacitance, but also the long-term capacitance variation after stress induction.