Browsing by Author "SILVESTRI, VJ"
Now showing 1 - 3 of 3
- Results Per Page
- Sort Options
Item type:Item, POST-EPITAXIAL POLYSILICON AND SI3N4 GETTERING IN SILICON(1982)Item type:Item, PRE-EPITAXIAL AND POST-EPITAXIAL GETTERING OF STACKING-FAULTS IN SILICON(1979)Item type:Item, SI EPITAXIAL QUALITY IMPROVEMENT BY POST-EPI POLY-SI GETTERING(1981)