Browsing by Author "Sun"

Now showing 1 - 5 of 5

Ferroelectric thin film processing for ferroelectric field-effect transistor
(2005-02-08)
Chen
;
San-Yuan
;
Sun
;
Chia-Liang
;
Chin
The present invention relates to a method for manufacturing a ferroelectric field-effect transistor, particularly to a ferroelectric field-effect transistor with a metal/ferroelectric/insulator/semiconductor (MFIS) gate capacitor structure. The method comprises steps of depositing a bismuth layered ferroelectric film on the insulator buffered Si, after a high-temperature thermal treatment, depositing an upper electrode on the bismuth layered ferroelectric film.
Indazole compounds
(2010-11-02)
Sun
;
Chung-Ming
;
Kuo
;
Min-Liang
This invention relates to indazole compounds of formula (I) or (II) shown below. Each variable in formula (I) or (II) is defined in the specification. These compounds can be used to treat cancer.
Microelectro mechanical system for magneto-optic data storage apparatus
(2006-02-21)
Hsu
;
Wensyang
;
Shieh
;
Han-Ping
;
Sun
The present invention relates to a Microelectro mechanical system structure. More specifically the invention relates to utilize a sacrificial layer to fabricate an air bearing structure, followed by forming an aperture, and reducing the aperture to nano-scale by electroplating. And then, by using of two thick film photoresist films for twice electroplating fabrication, for fabricate metal microcoils having high aspect ratio structure and interconnection metal line, to achieve efficiencies of utilizing area and reducing resistance. Moreover, proceed lithography depends on different portions and exposure dose. Then form a single photoresist film to have a specific dimension and thickness structure, finally, by using reflow process, forming a magneto-optic (MO) pickup head comprises of Supersphere Solid Immersion Lens (SSIL), nano-aperture, microcoils and air bearing by using an integrated fabrication, with advantages such as no high cost device and precise apparatus are required in the process of fabrication, mass production in batch fabrication, without step of assembly, for high-density data storage and rewritable record.
Process for fabricating supersphere solid immersion lens
(2006-08-01)
Hsu
;
Wensyang
;
Sun
;
Yi-Ting
The present invention relates to process for fabricating supersphere solid immersion lens (SSIL). The procedure of the present invention comprises the steps of: firstly, coating a positive photoresist layer on a substrate, followed by first exposure and second exposure with different exposure dose separately by first mask and second mask to form the positive photoresist structure with different dimensions and depths. The first exposure dose is supplied enough to make sure the patterns of the first mask can be observed on the positive photoresist layer during the alignment of the second exposure process. And the following reflow process forms a supersphere solid immersion lens (SSIL) structure.
Spatial light modulator
(2010-05-25)
Sun
;
Ching-Cherng
;
Yu
;
Yeh-Wei
;
Hsieh
A spatial light modulator applied to the collinear volume holographic storage system uses a hollow phase modulator to modulate the surrounding portion of an incident light to be a reference light, and the center portion of the incident light is modulated by an amplitude modulator to be a signal light. Thus, the spatial light modulator can enhance the convergence of the point spread function of the system.