Browsing by Author "Sun, YC"

Now showing 1 - 7 of 7

0.13 mu m low voltage logic based RF CMOS technology with 115GHz f(T) and 80GHz f(MAX)
(2003)
Guo, JC
;
Huang, CH
;
Chan, KT
;
Lien, WY
;
Wu, CM
Superior RF CMOS of 115GHz f(T) and 80GHz f(max) has been realized by 0.13mum low voltage logic based RF CMOS technology by aggressive device scaling and optimized layout. NFmin of 2.2dB at 10GHz is achieved even without deep N-well and ground-shielded signal pad. P,dB of near 10dBm can fit bluetooth requirement and 55% PAE at 2.4 GHz address the good potential of sub-100nm CMOS for low voltage RF power applications.
Evaluation of cleaning efficiency with a radioactive tracer and development of a microwave digestion method for semiconductor processes
(2000-02-29)
Lu, JK
;
Ko, FH
;
Chu, TC
;
Sun, YC
;
Wang, MY
A radioactive tracer technique was applied to investigate the effectiveness of various wet cleaning recipes in removing metallic impurities such as sodium, iron and cesium. The effects of solution temperatures and substrate types were studied. The mechanisms of the electrochemical segregation of metallic impurities between the substrate and cleaning solution were examined. The enthalpy of oxide formation and the effect of adsorption were the two reasons for the presence of surface metal impurities in the cleaning solutions. Our results indicated that SC2 and DHF can effectively remove the metallic impurities at 47 and 82 degrees C, while SPM and BOE are only effective at 82 degrees C. The gravimetric method was successfully implemented to evaluate the open-focused microwave digestion efficiency for anti-reflective coating and photoresist (PR) samples. By following the established microwave digestion method and inductively coupled plasma mass spectrometric determination, the detection limits (DLs) obtained for multi-elements were in the ng ml(-1) and sub-ng ml(-1) levels. Except for calcium, the spike recoveries of the metals were in the range 82-121% for the lithographic samples. The analytical results were found to be in reasonably good agreement with literature values, and the lithographic sample throughput can achieve up to 3.5 samples per hour for the analysis of 13 elements. (C) 2000 Elsevier Science B.V. All rights reserved.
Evaluation of impurity migration and microwave digestion methods for lithographic materials
(1999)
Ko, FH
;
Hsiao, LT
;
Chou, CT
;
Wang, MY
;
Wang, TK
In the section of incoming quality (IQC) or quality reliability analysis (QRA) of advanced semiconductor fabrication company, it is inevitable to regulate the strict standard for the incoming materials to ensure the reliability. In our radioactive tracer study, it is interestingly found the various amounts of metal and trace element impurities in the lithographic materials may migrate into the substrate. Based on the complex organic matrix in lithographic materials such as bottom anti-reflective coating (BARC), I-line resist and DUV resist, it is not easy to direct determine the multi-elements by the instrumentation. In this work, the lithographic materials are first decomposed by the close-vessel and open-focused microwave oven, and the digest is evaporated to incipient dryness. After adding water, the sample solutions are used either for evaluating the completeness of the digestion process by UV-VIS spectrometer, or for the determination of eleven elements using inductively coupled plasma mass spectrometry (ICP-MS). In addition, the digestion efficiency is also evaluated by the weight of total dry residual after various digestion recipes. By the complementary digestion method, the method detection limits for analytes can be achieved at lower than ng/g level. For evaluation of data accuracy, the results obtained by the two independent degestion methods are in good agreement. Moreover, the spiking recovery tests for all the elements are of 70 to 130%. According to the microcontamination control limit predicted by the SIA roadmap, the established method can meet the requirements for the quality control of lithographic materials in the future ten years.
Extensive reading online: an overview and evaluation
(2003-12-01)
Sun, YC
;
語言教學與研究中心
;
Language Teaching and Research Center
This study reports on the design and implementation of a reading program - Extensive Reading Online (ERO) - that aims to offer an online reading platform featuring specific needs for EFL learners in Taiwan. The system includes both teacher and student interfaces. Several reading aids are integrated into the system, such as concordancer help, stage-by-stage reading strategy training, and text annotation functions. ERO was integrated into a college level reading class. Results show that students held a positive attitude toward the reading system. Some recommendations for future improvement are also discussed.
Investigations of bulk dynamic threshold-voltage MOSFET with 65GHz "normal-mode" Ft and 220GHz "over-drive mode" Ft for RF applications
(2001)
Chang, CY
;
Su, JG
;
Hsu, HM
;
Wong, SC
;
Huang, TY
The RF properties of bulk dynamic threshold-voltage MOSFET (B-DTMOS) with a deep n-well isolation was investigated both under the normal DTMOS mode and two newly-proposed DTMOS operation modes: moderate (0.6V < Vgs = Vbs < 0.85V) and over-drive (Vgs = Vbs > 0.85V) modes. While Ft can be improved to 65GHz at 12.5mA with 1.5V Vds bias under normal-mode DTMOS operation, a high Ft of 220GHz with good linearity and stability is achieved under over-drive mode of operation.
Learning process, strategies and web-based concordancers: a case study
(2003-11-01)
Sun, YC
;
語言教學與研究中心
;
Language Teaching and Research Center
The recent widespread use of web-based concordancers seems to provide a promising mode for language teaching and learning, especially in the English as a foreign language (EFL) setting, because through concordancers students can easily gain exposure to a huge number of authentic and sorted language examples. This paper describes a case study of the learning process and strategies used by three Taiwanese college students in the concordancer setting. A web-based concordancer was used to assist the participants while undertaking a proofreading activity. Think-aloud protocol was used to collect their data. The results showed that the following four factors have influenced learners' learning process and strategies in use: (1) prior knowledge, (2) cognitive skills, (3) teacher intervention and (4) concordancer skills.
RF CMOS technology for MMIC
(2002-04-01)
Chang, CY
;
Su, JG
;
Wong, SC
;
Huang, TY
;
Sun, YC
This paper presents a high performance RF CMOS technology with a complete portfolio of RF and base band components for single-chip systems. Using an optimized 0.13 mum CMOS topology, f(T) of 86 GHz and f(max) of 73 GHz are obtained, in addition to a NFmin of 1.5 dB without ground-shielded signal pad. The high-Q accumulation-mode and diode varactors are optimized to perform a high tuning range of 47% and 25%, respectively. Inductors with a quality factor of 18 at 1.7 nH are obtained using copper interconnect, while capacitors with high unit capacitance and quality factor are fabricated with metal-insulator-metal structures. Finally, a deep n-well isolation is adopted to suppress the interblock coupling noise penetrating through substrate by 40 and 25 dB at 0.1 and 2.4 GHz, respectively. These results clearly demonstrate that CMOS technology can provide a complete solution for single-chip wireless systems. (C) 2002 Elsevier Science Ltd. All rights reserved.