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超高真空化學氣相沈積低溫新穎複晶矽薄膜電晶體的製作與可靠度之研究---子計畫I：化學氣相沈積系統成長低溫複晶矽薄膜電晶體及其在投影式液晶顯示器的應用
(
1999
)
張鼎張
;
TING-CHANGCHANG
;
國立交通大學毫微米實驗室
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