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Browsing by Author "Woo, Jason"

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    Contact resistance reduction on layered MoS2 by Ar plasma pre-treatment
    (2016)
    Ho, Yen-Teng
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    Chu, Yung-Ching
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    Jong, Chao An
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    Chen, Hung-Yi
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    Lin, Meng-Wei
    The effect of resistance (Rc) reduction of Ti/Au contact on MoS2 by ICP Ar plasma pretreatment is presented. The lowest Rc of 1.72 ohm-cm was achieved with the ICP treatment condition of 50W (ICP) /2W (chuck) for 10 sec. Compared with the contact without treatment (19.6 ohm-cm), the Rc improves over 10 times, demonstrating the advantage of Ar plasma pre-treatment on MoS2 contact.
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    Reliable Doping Technique for WSe2 by W: Ta Co-Sputtering Process
    (2016)
    Chien, Po-Yen
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    Zhang, Ming
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    Huang, Shao-Chia
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    Lee, Min-Hung
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    Hsu, Hung-Ru
    The electrical and material properties of WSe2 doped by W:Ta co-sputtering process were examined. High acceptor doping concentration (6x10(13)cm(-2)) and good effective hole mobility (16.5cm(2)/Vs) were realized. As a result, low sheet resistance (17k Omega/sq) and contact resistance with Pd metal (11.4k Omega-mu m) were measured using TLM structures.