Browsing by Author "Yang, Chang Cheng"

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Study of low-temperature and post-stress hysteresis in high-k gate dielectrics
(2007-01-01)
Wu, You-Lin
;
Lin, Shi-Tin
;
Yang, Chang Cheng
;
Wu, Chien-Hung
;
Chin, Albert
In this work, we present the comparison of hysteresis behaviors of HfAlON and HfSiON high-k dielectrics at low-temperature and subjected to constant voltage stress (CVS). The V-FB instability in the HfAlON and HfSiON gate dielectric were deeply studied. A model is proposed to explain the V-FB Shift and hysteresis direction in thus two samples. We also treat the CVS voltage and CVS time dependence of hysteresis and V-FB Shift. The decreasing hysteresis with temperature is ascribed to traps generation/recombination rate reduction at low temperature.
Study of low-temperature and post-stress hysteresis in high-k gate dielectrics
(2007)
Wu, You-Lin
;
Lin, Shi-Tin
;
Yang, Chang Cheng
;
Wu, Chien-Hung
;
Chin, Albert