標題: Microprobe array structure and method for manufacturing the same
作者: Chiou Jin-Chern
Hung Chen-Chun
Chang Chih-Wei
公開日期: 10-五月-2011
摘要: A microprobe array structure with self-stabilization capability and a method for manufacturing the same are proposed. The microprobe array structure is used to sense various biopotential signals, and is characterized in that the etching parameters are controlled during etching to manufacture a microprobe structure with a reduced bottom cross section so that the microprobe can be firmly stabilized in the skin tissue. Moreover, a conducting layer is formed on the microprobe to sense signals. A design of electric isolation between microprobes is also proposed. The microprobe array can therefore be used for the measurement of various biopotential signals, and can also be used as a stimulus.
官方說明文件#: A61B005/04
URI: http://hdl.handle.net/11536/104667
專利國: USA
專利號碼: 07941201
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