National Chiao Tung University Institutional Repository：形成一Ｔ型閘極結構的方法

Title:	形成一Ｔ型閘極結構的方法
Authors:	張翼黃祿哲張嘉華林岳欽成維華劉世謙
Issue Date:	1-Oct-2014
Gov't Doc #:	H01L021/336 H01L021/28
URI:	http://hdl.handle.net/11536/106072
Patent Country:	TWN
Patent Number:	I455212
Appears in Collections:	Patents

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