Title: | Flexible Electret Energy Harvester with Copper Mesh Electrodes |
Authors: | Chiu, Yi Lee, Ming Hsuan Hsu, Wei-Hung 電機資訊學士班 Undergraduate Honors Program of Electrical Engineering and Computer Science |
Issue Date: | 1-Jan-2014 |
Abstract: | Flexible energy harvesters are desired in biomedical applications since human motion is often complicated and aperiodic. However, most demonstrated flexible energy harvesters employ piezoelectric materials which are not biocompatible. Therefore we propose a PDMS-based flexible energy harvester with Parylene-C electret suitable for biomedical applications. To address the reliability issues of sputtered metal electrodes, we use copper mesh electrodes to improve the reliability. The proposed flexible harvester was fabricated and characterized. The measured power of the proposed harvester was 3.33 mu W in the compression tests at 20 Hz and 8.5 nW in the finger bending tests at 2 Hz. |
URI: | http://dx.doi.org/10.1088/1742-6596/557/1/012072 http://hdl.handle.net/11536/125003 |
ISSN: | 1742-6588 |
DOI: | 10.1088/1742-6596/557/1/012072 |
Journal: | 14TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS 2014) |
Volume: | 557 |
Appears in Collections: | Conferences Paper |
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