Low Temperature a-SiGe:H Near-IR Sensor and Photovoltaic Devices for Flexible Multi-functional Panel

Abstract

High Near-IR response photo-diode (0.1A/W@800nm) and high efficiency a-Si/a-SiGe tandem solar cell (8.38%) were demonstrated using high-density plasma-fabricated a-SiGe:H deposition technology with Si2H6 and GeH4 precursor. The low temperature (140 degrees C) a-SiGe: H films with low defect density (2.3x10(16)cm(-3)) are suitable for the applications of flexible solar self-powered multi-functional panel and 3D stacked monolithic devices.