Low Temperature a-SiGe:H Near-IR Sensor and Photovoltaic Devices for Flexible Multi-functional Panel

Title:	Low Temperature a-SiGe:H Near-IR Sensor and Photovoltaic Devices for Flexible Multi-functional Panel
Authors:	Kao, Ming-Hsuan Shieh, Jia-Min Shen, Chang-Hong Yu, Peichen Kuo, Hao-Chung Lee, Ching-Ting Yang, Fu-Liang 光電工程學系 Department of Photonics
Issue Date:	1-Jan-2013
Abstract:	High Near-IR response photo-diode (0.1A/W@800nm) and high efficiency a-Si/a-SiGe tandem solar cell (8.38%) were demonstrated using high-density plasma-fabricated a-SiGe:H deposition technology with Si2H6 and GeH4 precursor. The low temperature (140 degrees C) a-SiGe: H films with low defect density (2.3x10(16)cm(-3)) are suitable for the applications of flexible solar self-powered multi-functional panel and 3D stacked monolithic devices.
URI:	http://hdl.handle.net/11536/128500
ISBN:	978-1-55752-973-2
ISSN:	2160-9020
Journal:	2013 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)
Appears in Collections:	Conferences Paper