標題: | A Study of Mechanical Lift-Off Technology for High-Efficiency Vertical LEDs Using Micro-Porous GaN Template |
作者: | Lee, Chia-Yu Lin, Da-Wei Liu, Che-Yu Hsu, Shih-Chieh Kuo, Hao-Chung Wang, Shing-Chung Chang, Chun-Yen 電子工程學系及電子研究所 光電工程學系 Department of Electronics Engineering and Institute of Electronics Department of Photonics |
公開日期: | 1-一月-2013 |
摘要: | The high efficiency vertical light emitting diodes (V-LEDs) using mechanical lift-off with Micro-Porous GaN template formed by high temperature molten KOH wet etching process were demonstrated. The average threading dislocation density (TDD) of u-GaN after regrowth was estimated by transmission electron microscopy (TEM) reduced from 2x10(9) to 1x10(8) cm(2). The sapphire substrate was easily removed by mechanical lift-off during wafer bonding process. The light output of V-LEDs are greatly enhanced by 100% compared with Conventional-LEDs at an operating current of 20mA due to the high quality thin GaN and excellent heating dissipation. |
URI: | http://hdl.handle.net/11536/128502 |
ISBN: | 978-1-55752-973-2 |
ISSN: | 2160-9020 |
期刊: | 2013 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) |
顯示於類別: | 會議論文 |