亳微米元件電子束曝光精確度之研究

Title:	亳微米元件電子束曝光精確度之研究 An Improrement of He Electron Beam Exposure Accruacy
Authors:	中村一光張俊交通大學電子研究所
Keywords:	;
Issue Date:	1993
Abstract:
Gov't Doc #:	NSC82-0404-E009-202
URI:	https://www.grb.gov.tw/search/planDetail?id=45897&docId=6590 http://hdl.handle.net/11536/132157
Appears in Collections:	Research Plans