| 標題: | 亳微米元件電子束曝光精確度之研究 An Improrement of He Electron Beam Exposure Accruacy |
| 作者: | 中村一光 張俊 交通大學電子研究所 |
| 關鍵字: | ; |
| 公開日期: | 1993 |
| 摘要: | |
| 官方說明文件#: | NSC82-0404-E009-202 |
| URI: | https://www.grb.gov.tw/search/planDetail?id=45897&docId=6590 http://hdl.handle.net/11536/132157 |
| 顯示於類別： | 研究計畫 |
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