低溫成長之Si/SiGe元件之研究

Title:	低溫成長之Si/SiGe元件之研究 Low Temperature Deposited Si/Sige Devices
Authors:	張俊彥交通大學電子研究所
Keywords:	;
Issue Date:	1993
Abstract:
Gov't Doc #:	NSC82-0404-E009-233
URI:	https://www.grb.gov.tw/search/planDetail?id=45958&docId=6596 http://hdl.handle.net/11536/132159
Appears in Collections:	Research Plans