標題: | HIGH-SENSITIVITY CMUT WITH INTERLAYER METAL ARCHITECTURE FOR MEDICAL ULTRASONIC SYSTEMS |
作者: | Cheng, Teng-Chuan Liao, Yu-Te Tsai, Tsung-Heng 電機學院 College of Electrical and Computer Engineering |
關鍵字: | CMUT;TIA;ultrasonic sensor;transducer |
公開日期: | 2015 |
摘要: | This paper presents an integration of the capacitive micromachined ultrasonic transducers (CMUTs) and the transimpedance amplifier in medical ultrasound systems. The proposed CMUT and the sensing circuits are both fabricated on the same chip in a 0.18 mu m CMOS MEMS technology. Two interlayer metal structures are proposed to improve the sensitivity. The CMUTs are designed with 2MHz cells for medical diagnosis. The conversion efficiency of the CMUTs is 4 times and 1.8 times higher than that in the published structures. |
URI: | http://hdl.handle.net/11536/135764 |
ISBN: | 978-1-4799-8955-3 |
期刊: | 2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) |
起始頁: | 1211 |
結束頁: | 1214 |
顯示於類別: | 會議論文 |