標題: | Design and Analysis of a 2-DOF Planar Nano-positioner with Low Parasitic Rotation |
作者: | Lin, Hung-Ruei Hung, Shao-Kang Cheng, Chiao-Hua 機械工程學系 Department of Mechanical Engineering |
關鍵字: | parasitic rotation;flexure mechanism;planar positioner |
公開日期: | 2014 |
摘要: | This paper presents the design processes and performance of a new piezoactuated nano-positioner with low parasitic rotation. The flexure-based stage is composed of two symmetric flexure guiding mechanisms and two piezo stack actuators (PSAs) which have a 45 degree angle with X and Y directions. By analyzing the layout of the stage with kinematics and finite element analysis (FEA) results, it shows that this novel design offers a characteristic of low parasitic rotation. Analytical models of PSAs and stage are derived to assess the performances and to decide the parameters of geometry sizes of the hinge and the stage, total stroke, maximum von-Mises stress, and lifetime. A prototype of the stage is then fabricated, and its performances are tested. Two laser displacement sensors and PID control method are used to achieve a feedback control of the system. Experimental results reveal that the stage has stroke of 500 mu m x 500 mu m, resolution of 10 nm, and maximum parasitic rotation of 0.48 arc sec under stroke of +/- 50 mu m. |
URI: | http://hdl.handle.net/11536/135883 |
ISBN: | 978-1-4799-7923-3 |
ISSN: | 2373-5422 |
期刊: | 2014 INTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE (3M-NANO) |
起始頁: | 48 |
結束頁: | 52 |
顯示於類別: | 會議論文 |