標題: | Confocal displacement sensor with varifocal lens |
作者: | Weng, Chun-Jen Lan, Tzu-Hsien Hwang, Chi-Hung Liu, Da-Ren Chen, Chih-Yen Cheng, Pi-Ying Hsu, Ken-Yuh 機械工程學系 光電工程學系 Department of Mechanical Engineering Department of Photonics |
關鍵字: | Confocal;varifocal;displacement sensor |
公開日期: | 2015 |
摘要: | a confocal displacement sensor with a varifocal lens and a multi-wavelength rainbow laser was established in this study. The surface curvature of varifocal lens was varied by different current driving so that the focal length can be easily changed. Thus, we can quickly measure the distance between the sensor head and targets by detecting the reflective power according to the principle of confocal laser. This rainbow laser can operate at four different wavelengths. The laser beams with different colors can be used to measure the dispersion of varifocal lens. The range of measuring displacement with 20X objective lens in this displacement sensor is from 4.9mm to 5.9mm. The FWHM resolution of displacement is about 70 mu m. The step-height aluminate plate was measured by this system and the error of measuring distance is less than 35 mu m (0.75%). |
URI: | http://hdl.handle.net/11536/136324 |
ISBN: | 978-1-4799-6113-9 |
期刊: | 2015 IEEE INTERNATIONAL INSTRUMENTATION AND MEASUREMENT TECHNOLOGY CONFERENCE (I2MTC) |
起始頁: | 728 |
結束頁: | 733 |
顯示於類別: | 會議論文 |