標題: Confocal displacement sensor with varifocal lens
作者: Weng, Chun-Jen
Lan, Tzu-Hsien
Hwang, Chi-Hung
Liu, Da-Ren
Chen, Chih-Yen
Cheng, Pi-Ying
Hsu, Ken-Yuh
機械工程學系
光電工程學系
Department of Mechanical Engineering
Department of Photonics
關鍵字: Confocal;varifocal;displacement sensor
公開日期: 2015
摘要: a confocal displacement sensor with a varifocal lens and a multi-wavelength rainbow laser was established in this study. The surface curvature of varifocal lens was varied by different current driving so that the focal length can be easily changed. Thus, we can quickly measure the distance between the sensor head and targets by detecting the reflective power according to the principle of confocal laser. This rainbow laser can operate at four different wavelengths. The laser beams with different colors can be used to measure the dispersion of varifocal lens. The range of measuring displacement with 20X objective lens in this displacement sensor is from 4.9mm to 5.9mm. The FWHM resolution of displacement is about 70 mu m. The step-height aluminate plate was measured by this system and the error of measuring distance is less than 35 mu m (0.75%).
URI: http://hdl.handle.net/11536/136324
ISBN: 978-1-4799-6113-9
期刊: 2015 IEEE INTERNATIONAL INSTRUMENTATION AND MEASUREMENT TECHNOLOGY CONFERENCE (I2MTC)
起始頁: 728
結束頁: 733
顯示於類別:會議論文