標題: | Low temperature polyimide-to-polyimide direct bonding |
作者: | Liu, Hong-Che Chen, Chih 材料科學與工程學系 Department of Materials Science and Engineering |
公開日期: | 1-一月-2019 |
摘要: | In this study, two polyimide (PI) films were bonded at 250/300 degrees C for 60 min. A good bonding interface with few voids was observed. During the bonding process, the partial cured PI film still underwent cross-linking reaction, resulting the voids in bonding sample.. |
URI: | http://hdl.handle.net/11536/153262 |
ISBN: | 978-4-904743-07-2 |
期刊: | PROCEEDINGS OF 2019 6TH INTERNATIONAL WORKSHOP ON LOW TEMPERATURE BONDING FOR 3D INTEGRATION (LTB-3D) |
起始頁: | 75 |
結束頁: | 75 |
顯示於類別: | 會議論文 |