標題: Mechanical and tribological properties evaluation of cathodic arc deposited CrN/ZrN multilayer coatings
作者: Huang, Sung-Hsiu
Chen, Siao-Fan
Kuo, Yu-Chu
Wang, Chaur-Jeng
Lee, Jyh-Wei
Chan, Yu-Chen
Chen, Hsien-Wei
Duh, Jenq-Gong
Hsieh, Tsung-Eong
材料科學與工程學系
Department of Materials Science and Engineering
關鍵字: Nanostructured multilayer coatings;Cathode arc evaporation;Bilayer period;CrN/ZrN
公開日期: 25-Dec-2011
摘要: Five nanostructured CrN/ZrN multilayer coatings were deposited periodically by cathodic arc evaporation. The bilayer periods of the CrN/ZrN multilayer coatings were controlled in the range of 5 to 30 nm. The structures and bilayer period of the multilayer coatings were characterized by an X-ray diffractometer. The microstructures of thin films were examined by scanning electron microscopy (SEM) and transmission electron microscopy (TEM), respectively. Nanoindentation, scratch tests, Daimler-Benz Rockwell-C (HRC-DB) adhesion tests, microhardness and pin-on-disk wear tests were used to evaluate the hardness, adhesion, indentation toughness and tribological properties of thin films, respectively. It was found that the hardness and tribological properties were strongly influenced by the bilayer period of the CrN/ZrN multilayer coatings. An optimal combination of mechanical properties and excellent tribological behavior was found for a coating with a critical bilayer period of 30 nm. (C) 2011 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.surfcoat.2011.10.029
http://hdl.handle.net/11536/15354
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2011.10.029
期刊: SURFACE & COATINGS TECHNOLOGY
Volume: 206
Issue: 7
起始頁: 1744
結束頁: 1752
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