標題: Automatic assembly of quartz tuning fork and microcantilever
作者: Cheng, Chiao-Hua
Chen, Jian-Hua
Shieh, Jen-Yu
Hung, Shao-Kang
機械工程學系
Department of Mechanical Engineering
公開日期: 2012
摘要: Conventional atomic force microscopes (AFMs) detect microcantilever deflection using an optical lever system. However, the complex mechanism of the optical lever system and the alignment of the laser spot on the microcantilever prevent such AFM systems from scanning large samples. AFM systems using a quartz tuning fork (QTF) as a force sensor have been proven feasible, and enhance compactness of the AFM system. This paper presents the automatic assembly of the QTF sensor and the microcantilever of commercial AFM probe using a visual servo method.
URI: http://hdl.handle.net/11536/17025
ISBN: 978-1-4673-2576-9
期刊: 2012 IEEE/ASME INTERNATIONAL CONFERENCE ON ADVANCED INTELLIGENT MECHATRONICS (AIM)
起始頁: 580
結束頁: 585
顯示於類別:會議論文