標題: | The Effect of Oxygen Flow Rates on the Electrical Resistivity of MgO Thin Films in AC-PDPs |
作者: | Chou, Hong-Chieh Kim, Sung-O Chen, Kuang-Lang Chen, Samuel Lee, Chien-Pang Hsu, Chien-Hsing Chou, Kuo-Ching Huang, Chih-Ming 光電工程學系 Department of Photonics |
公開日期: | 2006 |
摘要: | Magnesium oxide thin films were deposited with different thickness and oxygen flow rates for investigation the effects of the electrical resistivity of MgO thin films in AC-PDPs. The surface roughness was characterized by AFM. It reveals that higher oxygen flow rate generates higher electrical resistivity of MgO thin films. |
URI: | http://hdl.handle.net/11536/17368 |
ISSN: | 1738-7558 |
期刊: | IMID/IDMC 2006: THE 6TH INTERNATIONAL MEETING ON INFORMATION DISPLAY/THE 5TH INTERNATIONAL DISPLAY MANUFACTURING CONFERENCE, DIGEST OF TECHNICAL PAPERS |
起始頁: | 383 |
結束頁: | 386 |
顯示於類別: | 會議論文 |